2001 Axcelis Fusion ES3

System Axcelis ES3 Asher

Vintage Feb-2001

300mm optional 200mm

Incl chiller, pumps, gasboxes decomissioned

in working conditioning, in production till April 2022

System comes incl following spare parts.

Spare chamber module,

All quarts parts used for 1 chamber

Main Computer

Microwave 3 pieces Lampcontrollers etc. Lamps approx. 75 pieces

Touchscreen

SMC foreline valve

Throttle valve

Edwards IH1800NRV pumps only 12.000 /10.000 Hrs running time