AMAT P5000 Mark II-J

AMAT P5000 Mark II-J

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Description

150 mm AMAT P5000 with 3 Delta DLH chambers configured for SiH4 based PECVD oxide and nitride dep processes

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Specifications

ManufacturerAMAT
ModelP5000 Mark II-J
ConditionUsed
Stock NumberGOD17062022P5K
WAFER SIZE150mm