2016 Adixen Various turbo pumps, Adixen and Agilent
2016 Adixen Various turbo pumps, Adixen and Agilent
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Available quantity: 6
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Description
6 turbo pumps, Adixen and Agilent.
Tool Status Disconnected
Wafer Size 300 mm
Fab Section Etch
Asset Description Various Turbo pumps - Adixen various models - Decon/crating required
Software Version NA
CIM None
Process Etch
Hardware Configuration (fab):
Main System: Various turbo pumps 6
Specifications
| Manufacturer | Adixen |
| Model | Various turbo pumps, Adixen and Agilent |
| Year | 2016 |
| Condition | Used |
| Stock Number | BM2400 |