2007 AMAT Centura Enabler Oxide Etch

2007 AMAT Centura Enabler Oxide Etch

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Description

Tarasemi purchased this from GF in Europe.


Tool Status Connected

Wafer Size 300 mm

Fab Section Etch

AMAT Centura Enabler , 4 chambers

Software Version GUI/MF:WindowsXP, FES:

WindowsServer2003;

Endpoint:Windows2000; Chamber:

VXWorks

CIM SECS/GEM

Process Dry ETC


Hardware Configuration (fab):

Main System Centura AP Enabler 1

Handler System Kawasaki 1

Factory Interface FOUP 3


Missing parts list attached below

More pictures attached


Notes:

The AMAT Centura Enabler is an Etch tool with 4 chambers. Each chamber has some parts missing and the gas cabinet you can see has 25% of the MFC's missing. It still has the PC and software which is located on either side of the gas cabinet and also another PC on the user interface. The AMAT Enabler was powered on a few weeks ago to decontaminate it, it did everything it should do on power up so it's still a very good tool for a refurbisher to take. There are chillers included but no pumps. 


Specifications

ManufacturerAMAT
ModelCentura Enabler Oxide Etch
Year2007
ConditionUsed
Serial Number414231
Stock NumberTARA-111