1997 KE KE DD-823V

Process: H2 ANNEAL

General Information:

1 System Layout: Main , Utility

2 System Type: L Type

3 Side Maintenance: No Side Maintenance

4 System Paint Color: IVORY

5 Furnace Front Surface Finish: Painted

6 Heater Model: -

7 Rapid Cooling Unit: Not Installed

8 N2 Load Lock: Not Installed

9 O2 Analyzer: Not Installed

10 Cassette I/O Type: (Normal / SMIF) SMIF

11 SMIF Maker / Model: ASYST / INDEXER 2200

12 AGV Compatibility: Unable

13 System Main Controller: CX3002A

14 Mechanical Controller: CX1215-1,1215-2

15 Sequence Controller: CX1312

16 Gas Controller: CX3201B

17 Gas Flow Chart Pannel: Installed (FRONT)

18 Operation Pannel: Installed (FRONT)

19 Signal Tower / Colors: Not Installed

20 Furnace Temperature Controller: CQ1600

21 Furnace Overtemp Detector: DN-150

22 Gas Detecter Maker / Model: Riken Keiki / GD-V11D

23 Detecting Gas: H2

24 Host Communications: Yes

25 User Host Computer: I/F HSMS

26 Manual (Drawing, Parts list etc): Not Include

Gas System:

1 Process Gas: N2 , H2

2 Basic Style: Integrated Gas System (Fujikin)

3 Manual Valve: FUJIKIN

4 Air-Operated Valve: FUJIKIN

5 Filter: PALL

6 Regulator: TANAKA ENGINEERING

7 MFC Maker / Model: AREA / FC-786, FC-866

8 PT Sensor Maker / Model: NAGANO KEIKI / ZT-17

9 DPM Maker / Model: NAGANO KEIKI / GC-84,GC-947

10 Check Valve: Installed

11 Baking System: Not Installed

12 Liquid Source Auto-Refill: Not Installed

13 Burn Controller: Not Installed

14 Veporizer: Not Installed

1 Pump: Not Installed

2 Pressure Control Valve: Not Installed

3 Pressure Controller: Not Installed

4 Pressure Sensor: Not Installed

5 Trap: Not Installed

6 Gas Cooler: Not Installed

1 Wafer Type: 200 mm

2 Auto Wafer Aligner: Not Installed

3 Wafer Qty. in Cassette: - not able to check

4 Cassette Storage Qty.: 24

5 Fork Type: 1 + 4 (VAC)

6 Fork-Wafer Presence Sensor: Installed

7 Fork-Variable Pitch: Installed

8 Magnetic Seal Rotation: Not Installed

1 Boat Type / Pitch: N/A

2 Boat Material: N/A

3 Cap Pedestal Material: N/A

4 Outer Tube: N/A

5 Inner Tube: N/A

6 SIC Liner Tube: N/A

7 Process Tube: N/A

8 External Torch: N/A

9 Profile T/C Type: N/A

10 ETC