Panasonic MSD261Y21 200mm Driver Control Unit TEL 2980-092167-11 ACT8 Working

• Part No: MSD261Y21
• TEL Tokyo Electron Part No: 2980-092167-11
• CT2980-092167-11
• Removed from a TEL Tokyo Electron Clean Track ACT8 200mm System

Installed Components

• Power Supply PCB Part No: 581B345E
• Processor PCB Part No: 581B357C
• Z Driver Part No: MSD043A1Y, DRIVER UNIT
• X1 Driver Part No: MSD3AZA1Y, DRIVER UNIT
• X2 Driver Part No: MSD3AZA1Y, DRIVER UNIT
• X3 Driver Part No: MSD3AZA1Y, DRIVER UNIT
• Backplane PCB Part No: 581B344B

This Panasonic MSD261Y21 200mm Driver Control Unit is used working surplus. The physical condition is good, but there are signs of previous use and handling.