AMAT P5000 3 chamber delta DhL

AMAT P5000 3 chamber delta DhL

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Description

 three chamber delta Dhl but is configured for 6 inch (this is not upgradable to 8”).    The delta offers two generators per chamber so more desirable.  All the generators are there and the tool looks complete. 

Specifications

ManufacturerAMAT
ModelP5000 3 chamber delta DhL
ConditionUsed
Stock NumberGOD12092022
WAFER SIZE150mm