2000 Nikon S204B

2000 Nikon S204B

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Description

Nikon, S204B, 200mm

X92V Lens Data:

Distortion =  0.015 µm

IU Flare = 1.80%

Lens Flare = 9.0%

Uniformity = 5.3%

Power = 779 mW

Total Focus Deviation = 0.202 µm 

Astigmatism = 0.081 µm 

Coma = 0.062 µm

Iso DOF = N/A µm (>35nm of CD Range at Best Focus)


Tool Status Running Wafers

Wafer Size 200 mm

Fab Section Lithography

Asset Description DUV Nikon S204B

Software Version MCSV Ver.S350C, OCSV Ver.S350, Tool Ver.S378

CIM SECS, GEM

Process DUV Lithography


Hardware Configuration(fab):

Main System Nikon DUV S204B 1

Handler System Type 3 1

Factory Interface Open Cassette 1

Specifications

ManufacturerNikon
ModelS204B
Year2000
ConditionUsed
Stock NumberBM2524