2000 Nikon S204B
2000 Nikon S204B
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Description
Nikon, S204B, 200mm
X92V Lens Data:
Distortion = 0.015 µm
IU Flare = 1.80%
Lens Flare = 9.0%
Uniformity = 5.3%
Power = 779 mW
Total Focus Deviation = 0.202 µm
Astigmatism = 0.081 µm
Coma = 0.062 µm
Iso DOF = N/A µm (>35nm of CD Range at Best Focus)
Tool Status Running Wafers
Wafer Size 200 mm
Fab Section Lithography
Asset Description DUV Nikon S204B
Software Version MCSV Ver.S350C, OCSV Ver.S350, Tool Ver.S378
CIM SECS, GEM
Process DUV Lithography
Hardware Configuration(fab):
Main System Nikon DUV S204B 1
Handler System Type 3 1
Factory Interface Open Cassette 1
Specifications
Manufacturer | Nikon |
Model | S204B |
Year | 2000 |
Condition | Used |
Stock Number | BM2524 |