AMAT Centura HP PVD

AMAT Centura 5200

Used known working

200mm

2 x standard PVD (Ti&Al) chambers,

1 x Preclean II,

1 x Orienter/Degas

1 x Cool Down

1 x CTI 9600 cryo compressor

1 x heat exchanger

1 x QDP 40

1 x QDP 40 with 250QMB blower

Many spares

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