Leica EM ACE600 sputter coater with glow discharge unit and 3 axis motorized stage with planetary drive

Sputter coater

- Basic unit consisting of:

• Metal vacuum chamber 200 mm 150 mm 195 mm

• Integrated oil free pumping system with turbo

pump and membrane (diaphragm) pump

• Integrated film thickness monitor (QSG-quartz

crystal measurement) 0.1 nm accuracy. Includes

10 crystals

• Automated stage rotation at room temperature

• LED vacuum chamber light

• Internal metal vacuum chamber shield, easily

removable for cleaning

• Removable door with large exchangeable safety

glass window

• Integrated power supply for sputtering,

continuously adjustable up to 150mA

• Mains cable

• USB port for log file download, USB stick

• Two blind flanges for cryo upgrade option

- Planar magnetron sputter head

• Easy target exchange system. No tools or screws

required

- Automated target shutter, easily removable

- Integrated touch screen for automated process

programming and saving of log files

- Triple safety system (door, cover and software

sensors)

- Operating manual

ACE600 glow discharge unit

Glow discharge unit for an EM ACE600 coater

including a sputtering process (Nr: 16771525,

16771526, 16771527, 16771528, 16771520)

- Integrated power supply adaptation for glow discharge

- Large area glow discharge

ACE600 Planetary drive

Planetary drive stage for EM ACE600

For uniform coatings of highly fissured specimen

surfaces.

- 6 planets with pin holes (ø 3,2mm) capable of

holding a variety of SEM Stubs (4 standard

stubs each)

- Simple exchange, no mounting required

- Fully integrated

ACE600 motorized stage with 3-Axis rotation

Motorized stage

- 3 axis (rotation, height, tilt) motorized stage with touch

screen interface

- 104mm table holds 25 standard SEM specimen

mounts with Ø3.2mm pin

Hint: This stage is recommended for best utilization of

ACE600 features. It can be easily exchanged with a

manual or cryo stage.