2010 AMAT Centura ACP DPN Plus Gate Stack

Decoupled Plasma Nitride

Deposition Equipment

Currently Configured for: 300mm

Asset HDD not included

This tool has 2 DPN and 2 PNA chambers.

APPLIED CENTURA ACP GATE STACK TPACP2XCENTURA

FEP CENTURA ACP GATE 300MM FlTEM F-GATEACP

APPLICATION

Centura ACP Gate Nitridation DRAM System 0465-95018

Centura ACP Four Facet Mainframe 0465-95050

(0746) - DPNPLUS 0465-95054

(R741) - RTP Radiance RP Chamber 0465-95058

APPLICATION OPTIONS

DPN CHAMBER FAMILY OPTIONS

Generator, Enhanced Pulsed RF 0465-95201

RTP RADIANCE CHAMBER

Technology Option, Open Loop Tuner 0465-95301

Process Application

OTHER OPTIONS

FACTORY INTERFACE OPTIONS

Configurable Colored Lights 0395-00642

Operator Access Switch 0395-00114

TIRIS with RF E99 Carrier ID 0395-09071

Docking Range Shield 0395-09021

Single Axis Aligner 0395-00602

REMOTE OPTIONS

Through the Wall 17in Rat Panel 0395-09068

Vendor Chm Model Chemicals / Gases Used  Chm/Unit Position  1 Position A(D746) DPNPLUS N2/He Chm/Unit Position  2 Position B(D746) DPNPLUS N2/He Chm/Unit Position  3 Position C(R741) RTP RADIANCE RP N2/O2/He Chm/Unit Position  4 Position D(R741) RTP RADIANCE RP N2/O2/He Chm/Unit Position SWLLA LOADLOCK A N2 Chm/Unit Position SWLLB LOADLOCK B N2 Chm/Unit Position Mainframe Mainframe  N2