AMAT AKT GEN 6 PECVD CHAMBER

AMAT AKT GEN 6 PECVD CHAMBER

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Description

Chambers are unused and were never commissioned.

Susceptor, gas shower and other chamber kitting not installed.

Substrate Size: 1500 mm x 1850 mm

Specifications

ManufacturerAMAT
ModelAKT GEN 6 PECVD CHAMBER
ConditionNew
Stock NumberGOD23082019720221954