Perkin Elmer 4400 Sputtering Tool

(3) Round Targets – targets and backing plates not included

RF Deposition with etch

Advanced energy RFG 1250 RF power supply

Advanced Energy RFG/AZX RF controller

CTI On board 8 Cryopump with Fast Regen Controller

307 Granville Phillps Ion Gauge Controller

MKS 270 Signal Controller