2010 Suss MA200 COMPACT MASK ALIGNER

2010 Suss MA200 COMPACT MASK ALIGNER

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Description

- Model: MA200 Compact

- Automatic Mask Aligner

- Top Side Alignment (TSA)

- 4" Vacuum Chuck (inquire for other sizes)

- 5" x 5" Mask Holder (inquire for other sizes)

- Up to 8"/200mm wafer capable

- Cassette to Cassette Operation

- Pre-Aligner: Through and Reflective Sensor

- UV400 High Resolution Optics

- Robot: Genmark GB4

- 1000W Lamp House

- CIC1200 Power Supply

- Wafer Flat Check Camera Option Included

- Ring Field Illumination for TSA Option Included

- Isolation table (included in main body)

- Vintage: 2010

Specifications

ManufacturerSuss
ModelMA200 COMPACT MASK ALIGNER
Year2010
ConditionUsed
Stock NumberGOD23082019720222048