2010 Suss MA200 COMPACT MASK ALIGNER
2010 Suss MA200 COMPACT MASK ALIGNER
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Description
- Model: MA200 Compact
- Automatic Mask Aligner
- Top Side Alignment (TSA)
- 4" Vacuum Chuck (inquire for other sizes)
- 5" x 5" Mask Holder (inquire for other sizes)
- Up to 8"/200mm wafer capable
- Cassette to Cassette Operation
- Pre-Aligner: Through and Reflective Sensor
- UV400 High Resolution Optics
- Robot: Genmark GB4
- 1000W Lamp House
- CIC1200 Power Supply
- Wafer Flat Check Camera Option Included
- Ring Field Illumination for TSA Option Included
- Isolation table (included in main body)
- Vintage: 2010
Specifications
Manufacturer | Suss |
Model | MA200 COMPACT MASK ALIGNER |
Year | 2010 |
Condition | Used |
Stock Number | GOD23082019720222048 |