Suss Delta 80 T2 Spin Coat and Bake System

- Model: Delta 80 T2

- Stand alone spin coater module with Hotplate

- For wafers up to 6" (150mm) or substrates up to 4" x 4" (100mm x 100mm)

- Spinner module

- 19" controller

- Operator panel with display

- Stainless steel cabinet

- Process bowl made of polypropylene

- Waste bottle with full sensor

- Chuck indexing.

- Gyrset closed cover coating technology

- Delta 150 Hotplate with 2 - 6" lift pin setup

- Power: 400 VAC 50/60Hz

- Brushless servomotor with resolver

- Max. Speed:

       - with Gyrset 8”: 3000 rpm

       - with Gyrset 5": 4000 rpm

       - with Gyrset 3": 5000 rpm

       - with Open Bowl option: 7000 rpm depending

          on substrate size and load

- Acceleration: 1 up to 5.000 rpm / s

- Spinning Time: 0,1 up to 999 s

- Dimensions: 1200 x 642 x 1317mm  (W x D x H)

- 3 Phase Transformer

- Fix Mounted GYRSET

- Programmable Electronic Dispensing Arm

- Pneumatic Mini Cartridge Dispense System

- Programmable Edge Bead Remover

- Nozzle Programmable Puddle Nozzle

- Operations Manual and documentation