1997 AMAT Centura HTF - 3 Chamber Epi tool

AS-IS AMAT Centura HTF 3ch Epi system, ATM

It was running wafers and is in very good condition

‐ 200mm

‐ Centura 5200 HTF Toxic Epi mainframe

- 480V/60Hz/600A

- Wide Body ENP loadlocks

‐ Wafer mapping

‐ HP robot

‐ Remote Centerfinding

‐ Epi chamber RP Position: A, B, C

  * R3.4 rotation assy

  * Variable Speed Blower

‐ Single slot non-contact cooldown chamber, position F

‐ Legacy Gas Panel (USED)

  * H2 Slit - 20 SLM

  * H2 Main - 100 SLM

  * HCL - 1 SLM

  * DCS - 1 SLM (Not Used, was RP tool)

  * MixDop - 300 SCCM

  * TCS - 30 SLM

  * Direct Dop - 500 SCCM