Yield Engineering Systems 3TA HMDS vapor prime oven
Yield Engineering Systems 3TA HMDS vapor prime oven
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Description
Interior chamber: 12"w x 13.25"d x 12"h
(2) PID Temperature Controllers
25-200ºC
PLD Logic Controller with Touchscreen Display
Granville-Phillips Digital Vacuum Gauge
Side Mounted, High-Capacity Syphon-Fill HMDS Vessel with Vacuum Gauge Mounted on Vessel
Vacuum and Pressure Interlocks Ensure Process Integrity and Nitrogen Pressure Control
Overtemp Protection Heater Shut-Off
Preheated Nitrogen to bring wafers rapidly to Operational Temperature
Multi-Program Capability
Chamber Material: Electro-Chemically Polished 316L Stainless Steel
120v, 1ph, 50/60hz, 14amp
Optional: 7CFM vacuum pump, hydrocarbon or fomblin
Specifications
Manufacturer | Yield Engineering Systems |
Model | 3TA HMDS vapor prime oven |
Condition | Used |
Stock Number | BM2918 |