2009 AMAT Producer GT

HDD Missing, seller can provide a HDD for testing the tool.

The tool apart from the HDD is complete and was working prior to deinstall.

Configuration:

2, Wafer Specification    

2.1 Wafer Size 12"  

2.2 Wafer Shape SNNF

3, Electrical Information    

3.1 Remote AC Line Voltage 208V  

3.2 Remote AC Hz 50/60Hz  

3.3 Remote UPS Yes

4, Mainframe Information    

4.1 Mainframe Type Producer GT  

4.2 Local Center Finder Type LCF  

4.3 Transfer Robot Type GT  

4.4 Robot Blade Type None  

4.5 Load lock Chamber pump type EPX TWIN 180L

5, SMIF/FI Information    

5.1 SMIF/FI Type or Model 5.4  

5.2 AMHS Config OHT  

5.3 Pre-Alignment    

5.4 Pass Thru & Storage 8Slot Wafer Pass Thru  

5.5 Number of Load Port & Position 2(#1 & #4 Position)  

5.6 FI Controller Type    

5.6.1 FE Computer Type IBM306M  

5.6.2 FI Computer Type IBM306M  

5.6.3 RT Computer Type IBM306M

6, Sub Components    

6.1 O3 Generator Type MKS ASTEX  

6.2 Ozone Cabinet INUSA  

6.3 Heat Exchanger Type SMC H2000  

6.4 Heat Exchanger Type for O3 MX500

7, Chamber Location & Process    

7.1 Chamber Location CH #A CH #B      

7.2 Chamber Type FCVD Twin SACVD Twin      

7.3 Process F-Oxide HARP USG    

8, Process Chamber Information    

8.1 Gas Box          

8.2 Face Plate          

8.3 Blocker Plate          

8.4 Input Manifold          

8.5 Output Manifold          

8.6 Teflon Manifold          

8.7 Ceramic Isolator          

8.8 Heater Lift Driver 0190-13840 1080-00126      

8.9 Heater          

8.10 RF Filter          

8.11 Pin Lift Driver          

8.12 Isolation(Gate) Valve Nor Cal 041010-1 Nor Cal 021010-1      

8.13 Throttle Valve MKS T3Bi MKS 683      

8.14 1st RF Generator None None      

8.15 2nd RF Generator None None      

8.16 RPS Type ASTRON e/ex ASTRON ex      

8.17 Manometer 5 Torr/ 100 Torr 20 Torr/1000 Torr      

8.18 AC Box        

9, Gas Delivery    

9.1 Gas Pallet Type          

9.2 Regulator(Y/N)          

9.3 Transducer(Y/N)          

9.4 Gas Pallet Configuration  

Stick Position Gas Type Volume Gas Type Volume

 #1 N2 Purge   N2 Purge          

#2 NF3 10SLM NF3 7SLM        

#3 AR 10SLM AR 15SLM        

#4 N2 200SCCM N2 5SLM        

#5 O2 2.5SLM N2 10SLM        

#6 N2 Purge   O3 Out          

#7 Si3H9N 1L O3 In          

#8     O2 30SLM        

#9 HE 5SLM N2 30SLM        

#10 N2 Purge   H2O In 10g/min      

 #11 NH3 700SCCM H2O Out          

#12 NH3 1SLM            

#13                

#14 H2O 1g/min TEOS 7g/min        

#15 AR 5SLM N2 50SLM        

#16                

#17                

#18                

#19                

#20                

#21 HE 5SLM HE 3SLM        

#22 N2 Purge   N2 Purge