Novellus Concept 2

Working condition

200MM, PVD SYSTEM

(1) DEGAS CHAMBER

(1) DAMACLEAN ETCH MODULE

(1) TA PVD CHAMBER

(1) CU HCM PVD CHAMBER

(1) CVD TI SIN CHAMBER

(1) ORIENTER

Numerous quartz pieces are included with the sale

 It is set up to do dual damascene copper interconnects