Axcelis NV 8250

Medium Current Implanter

Deinstalled

EATON NOVA / AXCELIS NV 8250HT Implanter

Pump and compressor

Vacuum system:

Cryo compressor: CTI-9600 X1

Beam line cryo pump 1: OB 8 (P3)

Process cryo: 2, 3 OB 8 (P4,5)

Source pump: STP1003C (P1)

Beam line turbo pump: STP300C (P2a), STP1000C (P2b)

Terminal rough pump: EBARA Pump 40 x 20 (RP1, RP2)

End station rough pump: EBARA Pump 50 x 20 (RP3)

Vacuum controller: HCIG

End station:

Cassette capability

(2) Cassettes, 8"

Automatic notch alignment capability

Wafer handling system: In-air / In-vacuum high throughput

Particle filter system: Class 1, UPLA filtered wafer handling system

Chuck electrostatic clamp

Chuck cooling interlock

ASYST LPT2200 SMIF Interface capability

Implant angle capability:

Variable implant angle

45° Tilt axis and 360° twist axis

Quad implant capability

Beam monitoring system:

Real-time patented dose control

Real-time beam profiler (Single dimension)

Gas box option:

Modular gas box

(4) String gas boxes

High pressure string

(2) SDS String hydride (Arsine and phosphine)

SDS String flouride (Boron trifluoride)

(3) Pressure transducers on SDS string (Per string): PSIA

Mass flow controller:

(1) Kit unit 1660

(3) Kit units 1662

Extraction PS:

0 - 40 KeV

Extraction voltage monitor

Vaporizer

Ion source: ETERNA ELS (Extended life source) - S10

Source bushing:

Extended life bushing

Source liner for extended life bushing

AMU System: Triple indexed mass analysis magnet / Power supply