KLA 5100XP

1. Control Console ✓ ViewSonic P220f monitor ✓ keyboard/mouse ✓ CD Drive, Disk Drive, Tape Drive 2. Main Body ✓ model: 5100 Overlay Registration System ✓ wafer size: up to 200mm capable ✓ Inspection station : houses optical system, autoloader, stage, and power supplies. ✓ interface microscope ✓ uses Coherence Probe Microscopy (CPM) technology ✓ Cohu Solid State Camera ✓ standard cassette loading : 2 cassette stations, pre-aligner, and robotic handler