Veeco DEKTAK 3ST Auto 1 Wafer Profiler

Sloan Dektak3ST Auto 1 Surface Profile Measuring System

For Step Height & Surface Texture Measurement

Self-Contained, Small Footprint Design

Joystick Controlled Scanning Stage 

8000 Data Points

Specimen Stage: 6.5”(dia.); 6”X Axis X 3”Y Axis Travel; 360° θ

Maximum Sample Thickness: 1.5”

Measurement Display Range: 100Å to 1,310KÅ

Vertical Resolution: 1Å/65KÅ; 10Å/655KÅ; 20Å/1310KÅ

Stylus Force Range: 1mg to 40mg

Scan Length Range: 50m to 50mm

Scan Time Range: 3 to 50 Seconds

Video Zoom Range: 60X to 420X (Motorized)

Wafer Stage: 6.5”(dia.); 6”X Axis X 3”Y Axis Travel; 360º Θ