2004 Applied Materials Centura 5200 Epi Reactor 200mm

- 200mm

- 3 atmospheric epi chambers

- 1 cool down chamber

- Variable Speed Blower

- HP+ Robot

- Wide Body Loadlocks

- On-The-Fly Center Finder

- Accusett BMV system

- HSMS GEMSECS

- 2 mixed dopant supply lines

- TCS supply line

- Universal loadlock platform (200mm or 150mm)

- with 208V external transformer

- No process kits included

2004 Vintage

Currently running in the FAB