2011 TEL LITHIUS PRO V
2011 TEL LITHIUS PRO V
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Description
Tool Status Connected
Wafer Size 300 mm
Fab Section Lithography
Vintage 2011
Asset Description LITHIUS PRO V 193nm Immersion Coater/Developer
Software Version 1.00.54
CIM SECS GEM
Process 193nm Immersion
Main System BCT BARC coaters 4
Main System CPRP 12
Main System CSWP 12
Main System CHHA 5
Main System BWEE 1
Main System CADH 4
Main System WEE 1
Main System Coaters 4
Handler System MPRA 2
Handler System PRAI 1
Handler System PRA 4
Options System WISC 1
Chemical cabinets (Solvent, Developer) 2
Shinwa T&H 1
Fire Suppression 1
Power Box 1
Missing/ Faulty Parts/ Accessories List
Fire Suppression (The N2 tank/head will not be shipped) 1
Specifications
Manufacturer | TEL |
Model | LITHIUS PRO V |
Year | 2011 |
Condition | Used |
Stock Number | BM3450 |