HITACHI S-7000 CD SEM

CD SEM Measurement Tool

• Wafer Size Range   Minimum 100 mm  Maximum 150 mm  Set Size 150 mm
• Resolution 150.00 Å
• Acceleration Voltage   Maximum Voltage 3 kV
• Critical Dimension Measurement Range 0.10 µm - 200.00 µm
• CD Measurement Resolution 150  Å  (15 nm)
• Cassette to Cassette YES
• Tilting Stage YES
• Gun Type Field Emission
• Other Information Cassette-to-Cassette Handling for 4”, 5” & 6” Wafers
• 100X ~ 100,000X Magnification
• 0.1 ~ 200 µm Measurement Range
• 15 nm Guaranteed (at 1 kV) Secondary Electron Image Resolution
• ± 0.02 µm or ±1%, whichever is greater, Reproducibility
• 0.7 ~ 3 kV (100 V/step)
• Auto-Focus and Auto-Stigmation
• Fully Automated CD Measurement
• Fully Programmable Stage with up to 60° Tilt
• Multi Point Measurement Capability

Year of Manufacture 1989

Condition Good