Rigaku 3630 TXRF WAFER/DISK ANALYZER
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Description
Wafer Size Range
Minimum 150 mm
Maximum 200 mm
• Date of Manufacture: February 1996
• Electronics On Board for Analysis of W(Na), W, Ti, P, Si, Al & B
• Xray Tube is Missing
• JCI Model SYS89012 System Controller
• PC Based Controller with IOMEGA 150 Multidisk Drive
• 200mm Wafer Chuck with 2ea Inserts
• 150mm Wafer Chuck with 1ea Insert
• RIGAKU Unit #9547-5203CS High Voltage Transformer
• 60 kV @ 80mA
• High Voltage Cable
• RIGAKU Model # 4852A1 Heat Exchanger
• MKS Model # 250-C-1A Pressure/Vacuum Controller
• MKS Model # 113B Power Supply/Readout
• Stainless Steel Roughing Line with Anti Suck-Back Valve
• AC Distribution Box - Input Voltage 200V, 80A, 60 Hz
Condition Very Good
Year of Manufacture 1996
Specifications
Manufacturer | Rigaku |
Model | 3630.0 |
Year | 1996 |
Condition | Used |
Stock Number | C06052015 |