Rigaku 3630 TXRF WAFER/DISK ANALYZER

Wafer Size Range Minimum 150 mm Maximum 200 mm • Date of Manufacture: February 1996 • Electronics On Board for Analysis of W(Na), W, Ti, P, Si, Al & B • Xray Tube is Missing • JCI Model SYS89012 System Controller • PC Based Controller with IOMEGA 150 Multidisk Drive • 200mm Wafer Chuck with 2ea Inserts • 150mm Wafer Chuck with 1ea Insert • RIGAKU Unit #9547-5203CS High Voltage Transformer • 60 kV @ 80mA • High Voltage Cable • RIGAKU Model # 4852A1 Heat Exchanger • MKS Model # 250-C-1A Pressure/Vacuum Controller • MKS Model # 113B Power Supply/Readout • Stainless Steel Roughing Line with Anti Suck-Back Valve • AC Distribution Box - Input Voltage 200V, 80A, 60 Hz Condition Very Good Year of Manufacture 1996