Hirata G450 Sorter 3 Port

Hirata G450 Sorter 3 Port

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Description

Still installed in Nano Research Laboratory Hirata Equipment Front End Module is located in front of the process equipment that processes wafers. The Equipment Front End Module passes wafers between the FOUP (pods) and the process equipment and the sorter transfers wafers in a clean environment.

Specifications

ManufacturerHirata
ModelKWS450-3180-VL-SL-001
Year2011
ConditionUsed
Stock NumberNY001