SemiTherm VTP 1500 LH LPCVD Reactor (SiN)
SemiTherm VTP 1500 LH LPCVD Reactor (SiN)
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Description
SemiTherm VTP 1500 LH LPCVD Reactor (SiN)
SemiTherm VTP 1500 LH LPCVD (SiN) Reactor is
configured for SiN processing of 200 mm wafers. System
is fully automated with cassette to cassette handling and
offers high throughput.
Specifications
| Manufacturer | SemiTherm |
| Model | VTP-1500-LH |
| Year | 1995 |
| Condition | Used |
| Stock Number | GOD18012016-002 |