GCA ULTRATECH XLS 7800 248nm DUV Stepper

GCA ULTRATECH XLS 7800 248nm DUV Stepper

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Description

GCA ULTRATECH XLS 7800 248nm DUV Stepper

GCA Ultratech XLS 7800 full field (22 squared mm), NA=0.51, 4X

reduction step and repeat exposure tool using a 248nm laser

source. 

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Specifications

ManufacturerGCA
Modelcxlattm01duv
Year1992
ConditionUsed
Stock NumberGOD18012016-010