GCA ULTRATECH XLS 7800 248nm DUV Stepper
GCA ULTRATECH XLS 7800 248nm DUV Stepper
Contact us for price
orCall +353 (0) 87 192 1110
Description
GCA ULTRATECH XLS 7800 248nm DUV Stepper
GCA Ultratech XLS 7800 full field (22 squared mm), NA=0.51, 4X
reduction step and repeat exposure tool using a 248nm laser
source.
Specifications
| Manufacturer | GCA |
| Model | cxlattm01duv |
| Year | 1992 |
| Condition | Used |
| Stock Number | GOD18012016-010 |