SVGL MICRASCAN MPT 193nm Scanner

SVGL MICRASCAN MPT 193nm Scanner

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Description

SVGL MICRASCAN MPT 193nm Scanner

SVG DUV (193nm) stepper configured for

processing 200mm wafers and linked to TEL

Act 8. Tool uses catadioptric lens design

incorporating both reflective and refractive

optical elements.

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Specifications

ManufacturerSVGL
ModelMICRASCAN MPT
Year2000
ConditionUsed
Stock NumberGOD18012016-015