SVGL MICRASCAN MPT 193nm Scanner
SVGL MICRASCAN MPT 193nm Scanner
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Description
SVGL MICRASCAN MPT 193nm Scanner
SVG DUV (193nm) stepper configured for
processing 200mm wafers and linked to TEL
Act 8. Tool uses catadioptric lens design
incorporating both reflective and refractive
optical elements.
Specifications
| Manufacturer | SVGL |
| Model | MICRASCAN MPT |
| Year | 2000 |
| Condition | Used |
| Stock Number | GOD18012016-015 |