Nikon i8A Stepper

The machine is fully running 5 inch reticles and 6 inch jeida wafers and has 15mm,17.5mm/20mm field sizes.

Tool has been fully rehosed including the pneumatics box,upgraded the camera system to 7.5 inch LCD screen and is fully functional Manufactured                 Aug 1991 Model                               2005i8A Computer                        PDP11/93  or Nest Wafer Loader                   Type 1 Wafer Size                        6 inch flat Indexers                           2 Wafer Loader Pre2          Yes Reticle Loader                 Open/Close style SU/SD Libraries                           2 Barcode Reader              Yes Reticle Size                       5 inch PPD                                    No Wafer Chuck                    Ceramic Ring Chuck LIA                                      Yes FIA                                     Yes LSA                                     Yes FC2                                     ISS ISS                                      Yes TTL RA                               Yes Chip Leveling                    Yes Autofocus                         single point standard Wafer stage                      Ballscrew style LLTC                                   Standard air Illuminator                       1500 Watt Tool fully running in our clean room but not tuned the lens or illuminator at present. We will setup the uniformity and the power next week but uniformity looks like it will come down to about 1.5 % as high at the right just now as running at 2.2% without any adjustment. Power at 430 mW/cm2 without maxing the lamp and changing optics as we do this as part of the refurb.