Config: 2F2B

Indexer, 2-SSW, 2-SSR, 2-RVS(R/R)

Open Cassette Type: 4-stage

Main Controller: NEC Industrial PC

Language: English version

Top-side Spin Unit

Nano Spray with Brush, Back-rinse, DI-1, -2

Vacuum Chuck

Back-side Spin Unit

Nano Spray with Brush, DI-1, -2

Magnetic Chuck

Main Power Box

Nano Spray Controller Box

Provide water leakage SUS plate and sensor for main body and nano spray controller

Mechanical Test: 500 wafers

Delivery: Approx. 3-month. ARO / EXW Korea

Warranty: 3-month / On-call Service

Main body: 1450 x 1950 x 1500mm, weight: ab. 1800kg

Power Box: 500 x 600 x 600mm, weight: ab. 80kg

Nano spray controller unit: 500 x 600 x 1200, weight: ab. 90kg

If needed tool installation,

Scope: Tier-1(Particle Check, > .16㎛ on Bare(Prime) Si Wafer(Notch, 0.75um)

Work: 2-engineer x 2-week

Optional Items(not included):

DI Water Filter

FFU system(Full covered on main body)

2007 DNS SS-80BW-AR 2F2B