DNS WS-820L Automated wafer cleaning system

DNS WS-820L Automated wafer cleaning system 2011 4 robots Condition: Complete like new working condition, only used during acceptance, no production.  No de-installed and in storage. Click below link for video: Video of DNS 820L running 100 Wafers with DNS Engineer Configuration: Automated Alpha Tool (Double Sided Porous Silicon: 25 wafer batch) based on WS-820L platform retrofittable to 50 wafer batch double sided Wafer size 200mm Wafer Flow Left to right Cassette included Components to include: Main body – 1 unit Loader – 1 unit Unloader – 1 unit Two robots for bath to bath transfer systems – one robot for wet wafers and one for dry wafers; Robot arms to be Teflon coated quartz - 2 units Double Sided Porous Silicon bath – 1 unit Electrical Breaker Box for U.S. safety regulation CD ROM Manuals Material is FM-PVC to meet FM4910 criteria System description: Position 1 : Loader (CTC type) Position 2 : CHCL (Robot Chuck Clean) Position 3 : PS (Single-Double Sided Porous Silicon bath) Position 4 : QDR (Quick Dump Rinse) Position 5 : SD (Spin Dryer) Position 6 : Unloader (CTC type) Other components: Notch Aligner Wafer Counter Fire extinguisher system for PS bath HF49% replenishment function for PS bath IPA replenishment function for PS bath(w/ anti explosion)