DNS_SS-W80A-AR

OEM : DNS

MODEL : SS-W80A-AR

SERIAL NO. : 11201

VINTAGE : JAN.1998

WAFER SIZE: 8 INCH

PROGRESS TYPE: WET/ CMP

COMPONENT :

MAINFRAME

CHEMICAL CABINET

NEC FC-9821X PC

SUPER VEXTA UDX5107 5-PHASE DRIVER

SUPER VEXTA UDX5107N 5-PHASE DRIVER

SUPER VEXTA UDX5128N 5-PHASE DRIVER

PS-500 UPS INSTALLED

YASKAWA CESA SERIES SERVO CONTROLLER

EBARA PJ-100 CHEMICAL PUMP

NGK_RC-1000AD-T CO2 CONTROLLER

Dimension

MAIN FRAME 58×82×100

CHEMICAL CABINET 43×28×80

PALLET-1: COVERS, MISC. PARTS 58×50×26

1998 DNS SS-W80A-AR