Ultratech Saturn Spectrum 300 Stepper

Specs: Manufacturer: ULTRATECH Model: SATURN SPECTRUM 300 Category: WAFER STEPPERS Wafer Size: 12"Equipment Details:Stepper, 12" GHI Expose tool, C4 16-Slot reticle library / Bar code reader Ghi-line lens: 2.0 um MVS Alignment Field size: 26mm x 34mm Cassette-to-cassette FOSB Environmental chamber Lower prism pellicle protector Illuminator: 1200 W MVS Extended wavelength filter Robotic wafer handling Track interface: Cassette to cassette. Specs: Manufacturer: ULTRATECH Model: SATURN SPECTRUM 300 Category: WAFER STEPPERS Wafer Size: 12"Equipment Details:Stepper, 12" GHI Expose tool, C4 16-Slot reticle library / Bar code reader Ghi-line lens: 2.0 um MVS Alignment Field size: 26mm x 34mm Cassette-to-cassette FOSB Environmental chamber Lower prism pellicle protector Illuminator: 1200 W MVS Extended wavelength filter Robotic wafer handling Track interface: Cassette to cassette.