DNS WS-820L

Wafer size 200mm Wafer Flow Left to right Cassette included Components to include: Main body – 1 unit Loader – 1 unit Unloader – 1 unit Two robots for bath to bath transfer systems – one robot for wet wafers and one for dry wafers; Robot arms to be Teflon coated quartz - 2 units Double Sided Porous Silicon bath – 1 unit Electrical Breaker Box for U.S. safety regulation CD ROM Manuals Material is FM-PVC to meet FM4910 criteria System description: Position 1 : Loader (CTC type) Position 2 : CHCL (Robot Chuck Clean) Position 3 : PS (Single-Double Sided Porous Silicon bath) Position 4 : QDR (Quick Dump Rinse) Position 5 : SD (Spin Dryer) Position 6 : Unloader (CTC type) Other components: Notch Aligner Wafer Counter IPA replenishment function for PS bath(w/ anti explosion) HF49% replenishment function for PS bath Fire extinguisher system for PS bath