Novellus C3 Vector Express AHM PECVD

No HDD

In storage

1 Chamber

Advanced Ashable Hard Mask process ( AHM )

"Designed to address the challenges in advanced technology nodes that utilize 193nm lithography for high aspect patterning etch, where thinning photo-resist material makes it difficult to extend conventional patterning, AHM on VECTOR Express represents a major technical breakthrough compared to conventional amorphous carbon film processing"