Axcelis HC3 Ultra x2 sets

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Description

Machine Model: Axcelis HC3 Ultra Weight: 12320 kg Year: 2000 - Vintage of each tools: 2000 - Condition of each tool: Good, professionally de-installed by Axcelis - All crated? Yes - Inspection? Yes, Any time - Will they have to pay for re-crate? Yes, you will need to pay for re-crating System Status: All controller loop is OK with V6 cell. The machine is running before De-contamination. Major Components: YASKAWA robot YASKAWA robot TRACK (MODEL: XU-ACL4140) In-Air wafer transfer (Vacuum Cassette is New modify type) DISK is VSD type Dry Transformer(NEW TYPE) HYT In Vac ARM is CAM arm Cryo pump system : On board 250 x3 Compressor 9600 x2 Shower type: P-shower 11020020 Cell type: V6 Load port type: Brooks FIXLOAD Disk TC DI/Cryo interlock 1187286 Cell controller V6 11053210 Scan controller 11049380 Wafer trnasfer controller 11054580 Load Lock controller 11054560 Rotary Drive controller 1195730 Rotary Drive Amp 11028010 ROBOT YASKAWA DRIVER BOX XU-BCD3111 ROBOT YASKAWA CONTROLLER BOX XU-CN0821 Power DOSE controller 11050220 Gas box controller 11017920 source controller 110000950 Filament PSU 1214110 ARC PSU 1214120 Cathode PSU 1214130 Terminal Beamline DI 1188151 Ground Electronic DI #1 1163967 Ground Electronic DI #2 1163960 Disk Vac DI 1195140 Electrode Manipulator DI 1188310 Plasma filament PSU 1214460 Plasma controller 11020020 Rotary driver brake controller 110098500/100101530 Source Magnet PSU 2100276 Terminal Electronic DI 1188375 Decel PSU 2200176 HV PSU extraction suppression 2200173 HV PSU DECEL SUPPRESSION 2200173 Gyro controller 11054570 AMU PSU (power ten) 11034940/ 2200175 Extraction PSU 2200187 Gyro ball screw Assy 1196510 V43 1196610 Air Interface 1908930 Air Interface 1908940 Wafer Holder Assy 110001490 CAM Arm assy 11030960 V3 assy 110002530 V7 11047650 Missing parts: No pumps included No PC or Monitor Crates: 1. End Station (in -air) – 250x210x240 2. DISK Module – 390x220x250 3. Magnet(AMU) – 190x160x200 4. End Station E-Rack – 210x120x250 5. Source Module – 210x170x220 6. Rear E-rack – 210x170x240 7. Chiller & Compressor – 250x200x200 8. PDO (Load port) – 170x230x100 9. Door Crate – 240x250x95 10. TRUSS Crate – 90x350x72 11. Flow Hood & Roof – 150x300x240 12. Loose Equipment – 200x300x180

Specifications

ManufacturerAxcelis
ModelHC3 Ultra
Year2004
ConditionUsed
Stock NumberGOD15082019
Wafer Size200mm