Kokusai Quixace Ultimate ALD SiO2 Vertical Diffusion Furnace

Kokusai Quixace Ultimate ALD SiO2 Vertical Diffusion Furnace

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Description

Kokusai Quixace Ultimate ALD SiO2 Vertical Diffusion Furnace EQUIPMENT DETAILS: Tool has been deinstalled and stored in warehouse. Inspect to confirm configuration and condition of tool. Tool Model : QUIXACE (DJ-1236V-DF) Process : ULT-SiO2 Software version: CX5000 (OU Ver.1.50.01) System power rating: 480 AC 3-Phase Loader configuration: 6 Loaders Furnace Unit: Cartridge Heater X 1 T/C for Heater Control X 5 T/C for Over temperature Protection X 5 4 5-P T/C for Cascasde Control X 1 5 Thyristor Unit for Control X 1 Clean Unit: 1 Clean Module Unit X 2 Controller: Main Controller (OU) X 1 Main Operation Unit X 1 Sub Operation Unit X 1 Process Module Controller X 1 DDC Temperature Controller X 1 Gate Drive Unit X 1 MFC/ Pressure Unit X 1 FOUP Loader Controller Unit X 1 9 Valve/Interlock Control Unit X 1 Switching HUB X 1 Signal Tower (Front) X 1 14 Gas Flow Pattern Panel (Front, Rear) X 2 15 EDA Controller X 1 Drive Mechanisms: I/O Shutter X 1 FOUP loader X 1 Rotation FOUP Storage X 1 FOUP Opener X 1 Wafer Transfer X 1 Wafer Detection X 1 Variable Wafer Pitch Converter X 1 8 Boat Elevator X 1 Furnace Port Shutter X 1 Boat Rotation X 1 Broken Wafer Detector X 1 Boat Changer X 1 Gas System: Gas Unit (IGS) X 1 Tape Heater for gas pipe X 1 Set 3 Bubble Unit X 3 Exhaust System: 1 Dry Pump & Mechanical Booster Pump X 1 2 Diaphragm sensor (1000 Torr) X 1 Diaphragm sensor (10 Torr) X 1 Main Valve X 1 Exhaust Piping X 1 Exhaust Dilution Line X 1 Reactor Tube Press Leak Line X 1 8 Back Ground Line X 1 9 Jacket Heater for exhaust pipe X 1 Set 10 Seal Cap Heater X 1 Safety: Light Curtain System X 1 Safety PLC X 1 Other: OHT I/F Unit X 2 CIDRW Controller X 1 RF-ID Amp Unit X 2 CIDRW CONTROLLER X 2 5 CIDRW Head X 2 Chemical Filter X 2

Specifications

ManufacturerKokusai
ModelQUIXACE (DJ-1236V-DF)
Year2013
ConditionUsed
Stock NumberGOD030120201
Wafer Size300mm