Gasonics AS2000 Spare Parts by Tarasemi

Please check the list below and contact us with your parts request. GASONICS OEM TOOL TYPE # of Units TARA PART # PART NAME Part Number GASONICS A2000 3 300075 VAC ARM PCB GASONICS A2000 3 300076 PCA,LOADLOCK,INTERFACE BD 90-2608 GASONICS A2000 1 300077 CONTROLLER BOARD 90-2658 GASONICS A2000 4 300079 PLASMA LAMP FAILURE DETECTION A90-031-03 GASONICS A2000 4 300080 DUAL SETPOINT SCR CONTROLLER 90-2736 GASONICS A2000 1 300081 DISPLAY DECODER 90-2609 GASONICS A2000 5 300083 ARM CONTROLLER BOARD 06764-802 GASONICS A2000 4 300084 48V CONTROL BOARD 810-2140-005A GASONICS A2000 7 300089 CHAMBERS AO1-132-01 GASONICS A2000 3 300093 POWER GAUGE