Novellus C2 Altus spare parts, Sabre spare parts

Contact us with your parts request NOVELLUS OEM TOOL TYPE # of Units TARA PART # PART NAME Part Number NOVELLUS C2 ALTUS 4 100303 ASSY,VENT PURGE 02-834770-00 NOVELLUS C2 ALTUS 19 100304 IO CONTROLLER 27-10157-00 NOVELLUS C2 ALTUS 3 100310 LOCD LOCK DOOR ACTUATOR LEFT ASSY NOVELLUS C2 ALTUS 3 100311 LOCD LOCK DOOR ACTUATOR LEFT ASSY NOVELLUS C2 ALTUS 5 100312 VAT VALVE ASSY 02-115275-00 NOVELLUS C2 ALTUS 4 100314 VAT VALVE ASSY 02-115274-00 NOVELLUS C2 ALTUS 3 100317 TYLAN GENERAL ADAPTORR MODEL AC2 27-053667-00 NOVELLUS C2 ALTUS 4 100319 PNEUMATIC SOLENOID ASSY 02-828715-00 NOVELLUS C2 ALTUS 4 100320 ASSY,FLAT PNL DISPP PWR 02-041243-00 NOVELLUS C2 ALTUS 4 100321 INDEXER END EFFECTOR 15-055682-00 NOVELLUS C2 ALTUS 4 100322 INDEXER END EFFECTOR 15-110374-01 NOVELLUS C2 ALTUS 4 100324 LEFT LOADLOCK INTFC PCB 03-034719-00 NOVELLUS C2 ALTUS 4 100325 RIGHT LOADLOCK INTFC PCB DLCM-S 03-034720-00 NOVELLUS C2 ALTUS 4 100326 BOARD,VALVE,RLL,DLCM/HILO 60-10131-00 NOVELLUS C2 ALTUS 3 100327 BOARD,VALVE,LLL,DLCM/HILO 60-10130-00 NOVELLUS C2 ALTUS 3 100328 KEYENCE ASSY 02-834711-00 NOVELLUS C2 ALTUS 3 100329 TEACH PENDANT NOVELLUS C2 ALTUS 1 100330 DLCM POWER CONTROL ASSY C2-DLCM-S0790 NOVELLUS C2 ALTUS 2 100331 ADVANCE POWER SUPPLY NOVELLUS C2 ALTUS 2 100332 POWER SUPPLY NOVELLUS C2 ALTUS 5 100333 POWER SUPPLY NOVELLUS C2 ALTUS 1 100334 POWER SUPPLY NOVELLUS C2 ALTUS 1 100335 POWER SUPPLY NOVELLUS C2 ALTUS 4 100338 VOLGEN ESK70U-1515 ESK70U-1515 NOVELLUS C2 ALTUS 1 100339 FLAT SCREEN NATIONAL DISPLAY SYSTEMS DM-3S12/ZN DM-3S12/ZN NOVELLUS C2 ALTUS 20 100401 I/O CONTROLLER 27-810157-00 NOVELLUS C2 ALTUS 2 100404 I/O CONTROLLER 27-10157-00 NOVELLUS C2 ALTUS 8 100405 CONTROLLER 02-810123-00 NOVELLUS C2 ALTUS 8 100407 PNEUMATIC PANEL 02-810546-00 NOVELLUS C2 ALTUS 7 100408 POWER & SIGNAL INTERFACE BOX 03-10766-00 NOVELLUS C2 ALTUS 6 100410 SETRA DATUM 2000 SETRA DATUM 2000 METER NOVELLUS C2 ALTUS 2 100411 CVD-W LPB/UPS 02-810540-10 NOVELLUS C2 ALTUS 6 100412 VOLGEN EXU-156R6 EXU-156R6 NOVELLUS C2 ALTUS 4 100413 VOLGEN EXU-246R3 EXU-246R3 NOVELLUS C2 ALTUS 4 100415 VOLGAN SX100U-15S SX100U-15S NOVELLUS C2 ALTUS 1 100416 CVD-W GAS BOX 02-824316-01 NOVELLUS C2 ALTUS 6 100427 BROOKS 5866 RT SERIES PRESSURE CONTROLLER 22-10502-00 NOVELLUS C2 ALTUS 35 100429 CARDWELL 154-30-1 NOVELLUS C2 ALTUS 27 100441 PLATE MTG PED 16-032558-00 NOVELLUS C2 ALTUS 5 100445 PLATE,MOUNTING,PED 16-032609-00 NOVELLUS C2 ALTUS 15 100446 ASSY PIN LIFT 1 AND 2 02-00470 NOVELLUS C2 ALTUS 1 100450 NDEXER, WAFER,EXCLUSION OPTION,200MM 15-00934-02 NOVELLUS C2 ALTUS 1 100453 MANIFOLD RING NOVELLUS C2 ALTUS 5 100456 CVDW INTERLOCK ASSY PCB 03-810748-00 03-10748-00 NOVELLUS C2 ALTUS 3 100457 DLCM-LITE LOCAL POWER BOX B/O BOARD 02-021383 NOVELLUS C2 ALTUS 7 100458 GAS BOX PCB 03-10738-00 NOVELLUS C2 ALTUS 7 300095 COMP CONT,P100/16M 02-834310-00 NOVELLUS C2 ALTUS 2 300098 CONTROLLER PM 250 233-4148-86 NOVELLUS C2 ALTUS 1 300107 I/O CONTROLLER 27-810157-00 NOVELLUS C2 ALTUS 3 300108 TRANSPECTOR TSP TH100 NOVELLUS C2 ALTUS 1 300109 MODEL 4421 RF POWER METER 3509 / 4421 NOVELLUS C2 ALTUS 1 300110 DIAGNOSTIC HUB 10087285 NOVELLUS C2 ALTUS 3 300111 VAT VALVE ASSY 02-115275-00 NOVELLUS C2 ALTUS 1 300112 VAT VALVE ASSY 02-115274-00 NOVELLUS C2 ALTUS 1 300116 PCB 001-5526-01 NOVELLUS C2 ALTUS 1 300117 CVD-W INTERLOCK 03-10748-00 NOVELLUS C2 ALTUS 3 300119 C2 HEATER PEDESTAL 02-033134-00 NOVELLUS C2 ALTUS 5 300422 POWER SUPPLY ESK70U-1515 NOVELLUS C2 ALTUS 2 300423 POWER SUPPLY EXU-246R3 NOVELLUS C2 ALTUS 12 300424 MODULE CONTROLLER P100 02-034310-00 NOVELLUS C2 ALTUS 5 300426 ARMS NOVELLUS C2 ALTUS 1 300427 HEAT EXCHANGER 0221-10821 NOVELLUS C2 ALTUS 1 300429 MOER 2.25MM 500027083 NOVELLUS C2 ALTUS 1 300432 POWER SUPPLY 12V 233-2215-46 NOVELLUS C2 ALTUS 1 300433 AC POWER INPUT 233-2219-92 NOVELLUS C2 ALTUS 2 300434 POWER SUPPLY & CIRCUIT BREAKER NOVELLUS C2 ALTUS 5 300435 PM SERVO MOTORS JGHT-4921-2 NOVELLUS C2 ALTUS 1 300460 POWER ONE POWER SUPPLY PFC500-1024 NOVELLUS C2 ALTUS 3 300461 TRANSPECTOR TSP TH100 NOVELLUS C2 ALTUS 17 300462 MOER RINGS 2.5 NOVELLUS C2 ALTUS 1 300463 INDEXER TONGS NOVELLUS C2 ALTUS 1 300464 PNEUMATIC BOARD 02-810546-00 NOVELLUS C2 ALTUS 1 300466 POWER SUPPLY EXU-246R3 NOVELLUS C2 ALTUS 1 300468 RIGHT LOADLOCK INTFC PCB 03-834720-00 NOVELLUS C2 ALTUS 2 300469 CVD-W INTERLOCK 03-10748-00 NOVELLUS C2 ALTUS 4 300470 I/O CONTROLLER 27-810157-00 NOVELLUS C2 ALTUS 6 300471 INTF CVD-W & ETCH 03-10355-00 NOVELLUS C2 ALTUS 2 300474 ASSY,LWR SPINDLE 03-810534-02 NOVELLUS C2 ALTUS 1 400036 GSNX New Elevator Alignment Tool NOVELLUS C2 ALTUS 5 100406 ASSY VACUUM UTILITIES WEVD 02-810131-00 NOVELLUS CVD 2 700661 PEDESTAL 050-01-912-0100 NOVELLUS CVD 1 700698 DEGAS ASSY QUAD 4 CHANNEL 02-103445-00 NOVELLUS CVD 1 700699 SERIES 11 BOARD 3200-1065-01 NOVELLUS CVD 1 700701 DIRECTIONAL POWER SENSOR 4025 NOVELLUS CVD 2 700702 SENSOR INTEGRATION PLATFORM TWSPK001 NOVELLUS SABRE 1 700839 HEATER PEDESTAL 02-287781-00 NOVELLUS SABRE 1 700847 HOST PORT CONTROL 27-260607-00N NOVELLUS SABRE 1 700848 CONTROL BOX 03-056905-00 NOVELLUS SABRE 1 700849 CONTROL BOX 119370R NOVELLUS SABRE 1 700850 PLATFORM CONTROLLER 02-168112-00 NOVELLUS SABRE 3 700851 PLATFORM CONTROLLER 02-257935-00 NOVELLUS SABRE 2 700853 VECTOR DRIVE 27-130440-00 NOVELLUS 2 900961 CPW 6/480 04-722791-02 NOVELLUS CVD 1 700592 HOIST AND CRANE FOR VACUUM ROBOT 79-169649-00 NOVELLUS CVD 3 700584 HEATER PEDESTAL 02-145733-00N NOVELLUS CVD 48 700585 MOUNT DRIVE SHAFT RF ENCLOSERE 15-344507-00 NOVELLUS CVD 2 700586 FIXTURE BLANK LEFT LTM VCTR 72-252834-02 NOVELLUS CVD 1 700587 FIXLOAD ALIGNMENT PDO 72-254110-00 NOVELLUS CVD 2 700588 FIXTURE BLANK RIGHT LTM VCTR 72-252834-01 NOVELLUS CVD 2 700589 POWER METER 4421 NOVELLUS CVD 2 700590 BAR CENTRE PLANE 15-155151-00 NOVELLUS CVD 1 700591 COVER PROTECTIVE PM 15-251882-00 NOVELLUS CVD 1 700593 HOIST AND CRANE E20-13087-05-000 NOVELLUS CVD 2 700594 DUCT 16-177756C01 NOVELLUS CVD 5 700595 TOOL SUSCEPTOR 16-185099D01 NOVELLUS CVD 2 700596 EXHAUST FLANGE 0513012-107 NOVELLUS CVD 1 700598 PEDESTAL 02-159684-00N NOVELLUS CVD 1 700605 PEDESTAL 02-145732-00N NOVELLUS CVD 1 700632 AMP PWB PCB 13-406263-01 NOVELLUS CVD 2 700649 PEDESTAL 02-176383-00 NOVELLUS CVD 1 700659 PEDESTAL 050-01-912-0100 NOVELLUS CVD 1 700700 MFC FC-7820C 22-133312-00