Temescal BJD-1800 Electron Beam Evaporator

• PLC/PC Based Control System
• TEMESCAL Simba 2 E-Beam Power Supply
• TEMESCAL Programmable Sweep Controller
• TEMESCAL Six Pocket E-Beam Source with 15cc Crucible Pockets
• TEMESCAL TRC-3460 Turret Rotation Controller
• INFICON XTC-2 Deposition Controller
• GRANVILLE-PHILLIPS Mini-Convectron Gauges
• GRANVILLE-PHILLIPS Mini-Ion Gauges
• CTI CryoTorr 8 Cryogenic Vacuum Pump
• CTI Water Cooled Compressor
• 18” (i.d.) Stainless Steel Chamber with Motorized Lift
• Hinged Chamber Lid
• Factory Shielding Set Included
• TEMESCAL Lift-Off Fixturing for 3” & 4” Wafers – 2ea Sets Each
• EDWARDS QDP40 Dry Vacuum Pump
• Complete System Refurbishment Included

Description Temescal BJD-1800 Electron Beam Evaporator

Vacuum System Cryo Pumped

Load Lock Included No

E Beam Power Supply   Power Supply Type Triode Tube  Number of Guns Controlled 1  Lateral/Longitudinal Beam Sweep Temescal Programmable Sweep Control  Electron Source Type Six Pocket  Crucible Size 15.00  cc  (0.92 cu in)

Substrate Heaters No

Film Thickness Monitor Yes

Residual Gas Analyzer No

Refurbished YES

Condition Like New