Nikon NSR-SF120 i-Line Stepper

Nikon NSR-SF120 i-Line Stepper
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Available quantity: 2
Description
Description: i-Line Stepper Manufacturer: Nikon Model: NSR-SF120 Wafer Size: 12 inch Configuration: # Item Detail 1 Exposing source i-line(Wavelength 365nm) 2 Surface illumination (standard) 1000[mW/cm2]or more 3 Reduction ratio 1:4 4 Throughput (1) FIA-EGA 100wafer/hour or more - Step pitch 25nm×33mm (2) LSA-EGA 90wafer/hour or more - 76shot (300mm wafers) - Exposure amount 90mJ/cm2 5 Resolution 280nm or less 6 Alignment accuracy 35nm or less (M+ 3σ) 7 Lighting NA Three equipped with Squeezing (1) NA:0.43 CONV (2) NA:0.36 CONV (3) I-NA:0.50 2/3Ann 8 Projection lens NA Variable 0.50~0.62 9 VRA angle, exposure range Two Type 26×33mm, 25×33mm (Scan Field) 10 Wafer alignment FIA/LSA 11 LC control Adjust only 25×33mm 12 Reticle Buffer Max 14sheet 13 Reticle Load Port 2 14 Cool plate before exposure None 15 Options PPD (Pellicle on particle inspection device, 2D barcode ,WL front In-line), Relay FOUP unit
Specifications
Manufacturer | Nikon |
Model | NSR-SF120 |
Condition | Used |
Stock Number | GOD01062020120 |
WAFER SIZE | 300mm |