2013 Hitachi M-8190XT

Hitachi, M-8190XT, 300mm, Plasma Etch

3 Chambers

In Fab, Warm Idle

Software version: 2.0405

CIM: E84, SECS-GEM. GEM300, Interface A

Hardware Configuration (fab):

Main system: Hitachi HTA M-8190XT (3E) Etch System - 1

SMIF system: Load Ports - 3

Handler system: Standard Automation Equipment & Software - 1

Options: Equipment Specification based upon #KF0-6359