2001 Hitachi S-9300 CD-SEM

Vintage 2001. Still installed and running

300mm setup that was modified to run 150mm

OEM Model Description

The S-9300 is standard equipped with a laser interferometer stage for ultra-high target addressing precision, mini-environment and FOUP compatible loadports. Advanced automation scenarios like FOUP delivery by automatic material handling systems (AMHS) and single wafer identification can be supported.