Estion, E-RETICLE V 4M, Electrostatic Charge Measurement

Estion, E-RETICLE V 4M, Electrostatic Charge Measurement

Reticle Electrostatic Charge Measurement System

Installed, Idle.

Tool Status Connected 

Process Electrostatic Charge Measurement

Hardware Configuration (fab):

Main System: Estion E-RETICLE V 4M System - 1

Factory Interface SMIF - 1