Suss MJB3

Suss MJB3 submicron mask aligner with 350w lamphouse and splitfield optics

Splitfield microscope

Leica objectives 3.5x/10x/20x

350W lamphouse with Ushio USH-350DS Hg lamp

UV400 near UV optics, 350-450nm, 0.6um resolution

3" vacuum chuck

3"x3" mask holder