2007 Applied Materials SEMVision G3 Lite

2007 Applied Materials SEMVision G3 Lite

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Description

2007 Applied Materials SEMVision G3 Lite EQUIPMENT DETAILS: Tool config is based on original PO, please verify tool details at tool inspection Software:5.4.500 General Description Wafer Size: 300mm +/- 0.05mm (SEMI M28), 775 +/- 25um, notched wafers Carrier: 2 X 300mm FOUP 25wf Interface: 2 FOUP (Continuous flow operation) Supporting Remote Units Dry & Vacuum pumps (Supplied by customer): Ebara /ES80 EPDU: Yes UPS - THREE PHASE UPS 208V 60HZ:No, customer supplied Vacuum Block Assembly: Yes Fixed System Configuration Wafer ID Reader: Backside Bar Code Wafer Scribe Reader P I/O FOR OHT (Hokuyo): VERITYSEM-AUTO5 Operator Access Switch: VERITYSEM-AUTO8 Wafer Mapping Capable: Through Beam Mapper VERITYSEM-AUTO6 Optical FOV: Large optical FOV100Xum 20X & 2.5X

Specifications

ManufacturerApplied Materials
ModelSEMVision G3 Lite
Year2007
ConditionUsed
Stock Numberem1099
WAFER SIZE300mm