Lam Research 2300e5 KIYO 45

Lam Research 2300e5 KIYO 45

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Description

LAM Research 2300e5 KIYO 45

Polysilicon Etch

EQUIPMENT DETAILS:

1. 2300 PLATFORM (E)

1. 3 FOUP TDK

2. 3* Hermos Carrier ID

3. Light Curtain w/ OHT/RGV

4. 25 Slot Input Buffer Station

5. 25 Slot Aux Buffer (Corr Res) NSR101271,lnput buffer anti-corrosion

6. NSR101435,TM UPS bypass kit with Maratho

7. Conditioning Station (7 Wafer)

8. User Interface: Side and Front Monitor U

9. System UPS Circuitry

10. Earth Leakage Breaker

11. Cable: TM-Subpanel, 100ft

12. Signal Light Tower, R-O-G-B Slim Line

13. Sys Calibration and Alignment Software Variable ID

14. ATM Differential Pressure

15. APCS

16. VTM Breakout Board/Cover

17. Light Tower Buzzer

18. NSR9397, Female connectors for OHT

19. NSR10702, N2 Flow Monitoring on UPC

20. Metric to Inch Conv. Fittings

21. VTM Pump: Edwards (EPX)

22. NSR9943, Vespel for Airlock

23. NSR100972, SST Gas Filter

24. Vespel Single Sense

2. 4* 2300 VERSYS KIYO45 OPTIONS

1. 4* ESC Hose Kit: Low Temp with Shaft Seal

2. 4* OES Plus

3. 4* Sym. Liner Door (Improved)

4. 4* 2700 I/s BOCE Turbo Pump

5. 4* Chamber Manometer: Alternate (-011)

6. 4* NSR101186, 18ft TCP RF Cable on Kiyo45

7. 4* NSR10013, Kiyo45 Particle Reduction

8. 4* NSR6205, 3/4" swagelock connection

3. 2300 STRIP45 OPTIONS

1. 1* OES Endpoint Option

2. 1* Stainless Steel w/ 5/8 -1/2 Reducer

3. 1* Versys Kiyo45 Quick Clean kit

4. 2300 GAS BOX

1. 2300 VERSYS KIYO45 JETSTREAM GAS BOX

1. *4 9 Gas Configuration (JetStream)

2. 28*Jetstream Gas Line

3. 8*Heated Gas Line

4. 4*Non Standard MFC

5. 4*Gas System: PM Versys Kiyo45 NSR 1

2. 1* Facility Interface Box (System)

3. 16* Facility Interface Box (Per Line)

4. 1* Future PM Containment

Specifications

ManufacturerLam Research
Model2300e5 KIYO 45
ConditionUsed
Stock Numberem1173
WAFER SIZE300mm