2005 Mattson Technology, Inc Aspen III ICPHT

2005 Mattson Technology, Inc Aspen III ICPHT

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Description

Mattson Technology, Inc. Aspen III ICPHT

Stripper/Asher

MFG Date: 2005

EQUIPMENT DETAILS:

Mattson Aspen III

- Qty 3 FOUP Loaders

- Qty 2 ICP HT Chambers

- Advanced Energy RFG-3001 RF Generators

- Gas Configuration (Unit UFC08100 MFCs)

1. He 10SLM

2. H2 10SLM

3. CF4 200sccm

4. H2/N2 5SLM

5. N2 10SLM

6. O2 10SLM

Specifications

ManufacturerMattson Technology, Inc
ModelAspen III ICPHT
Year2005
ConditionUsed
Stock Numberem1178